Leo, A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics. Ben-Mrad, A 3-DOF MEMS electrostatic piston-tube actuator. Yeo, Piezoelectric ultrasonic micro/milli-scale actuators. Zhao, Ultrasonic Motors: Technologies and Applications (Springer, Berlin, 2011)ī. Zhu, Developing a linear piezomotor with nanometer resolution and high stiffness. Youm, On the coarse/fine dual-stage manipulators with robust perturbation compensator, in Proceedings of IEEE International Conference on Robotics and Automation, vol. Youm, Robust and time-optimal control strategy for coarse/fine dual-stage manipulators, in Proceedings of IEEE International Conference on Robotics and Automation, vol. Yen, Servo system design of a high-resolution piezo-driven fine stage for step-and repeat microlithography systems, in Proceedings of Annual Conference of Industrial Electronics Society, vol. Tomizuka, Robust controller design for a dual-stage positioning system, in Proceedings of International Conference on Industrial Electronics, Control, and Instrumentation, vol. Okazaki, Precision positioning control apparatus and precision positioning control method. Future development of these technologies is also briefly discussed addressing issues such as increasing the output power, the efficiency, and further miniaturization of these devices. These include a piezoworm stage and a USM with segmented electrodes. Two examples of piezoelectric motors are discussed in detail. Several designs from the literature and commercial suppliers are reviewed and their characteristics are presented. In this chapter, these motors are classified into quasistatic and ultrasonic motors (USMs) based on their working frequency. Piezoelectric motors use actuators that take advantage of the converse piezoelectric effect.
This is due to their unique characteristics including their very high accuracy and short response time as compared to electromagnetic based motors and actuators and higher output force compared to electrostatic actuators. There are a large variety of different designs optimized for different applications, from extremely high force or microsecond response, to long travel ranges in the millimeter and centimeter range.Piezoelectric actuators are increasingly used in various nanopositioning applications and emerging applications where miniaturization is important. Not all piezo actuators and motors are created equal. Piezo University: Designing with Piezo Mechanicsĭifferent Types of Piezo Mechanisms Solve Different Problems Piezoelectric Products for Motion Control: PI also provides value added manufacturing and custom assembly of piezoelectric components for OEMs.
in Semiconductors Bio Tech & Mecial Engineering Lasers, Optics, Microscopy Aerospace Engineering Precision Machining Astronomy and Microsystems Technology. PI and PI Ceramic are the leading manufacturers of piezoelectric mechatronic systems such as piezoelectric actuators, pzt transducers for motion control, nano positioning and industrial applications, e.g. Piezoelectric Transducers can also be used for sensing, ultrasound generation and medical applications.
Piezoelectric mechanisms can provide very fast and precise motion. Piezo Mechanisms, Piezoelectric Transducers, Piezo MechanicsĮngineered for Motion, Sensing and Dispensing
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